Nanofabrication Technology

Solid State Electronic Devices

PHYS201

The purpose of this course is to help students grasp the terminology, concepts, processes, products, and equipment commonly used in the manufacturing and application of solid-state electronic devices.

3 credits
Prerequisite: CHEM101 (C or better) and PHYS106 (C or better)
Corequisite: None

Nanofab Statistics and Technology

PHYS202

This course will connect the educational experience at the community college with the nanofabrication capstone semester at Penn State University. Topics covered will be an overview of semiconductor manufacturing, careers in nanofabrication, and current and proposed applications of nanofabrication and the basic concepts of statistics in process control.

2 credits
Prerequisite: None
Corequisite: None

Material, Safety and Equipment Overview

NANO211

This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment, and health issues. Topics covered include operation of the several cleanroom systems necessary for environmental safety and health issues. Also specific materials handling issues are addressed.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: None

Basic Nanofabrication Processes

NANO212

This course provides an overview of basic process steps. The course details the steps needed to fabricate nano size devices. Types of structures studied include microelectromechanical systems, biomedical structures, displays, and microelectronic devices, such as diodes and transistors. Students will learn the process flow for each configuration through "hands-on" processing.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: NANO211

Materials in Nanotechnology

NANO213

Thin films in NANOFABRICATION. This course covers thin film deposition etching practices. The first part includes atmospheric, low pressure, plasma enhanced chemical vapor, sputtering thermal and beam evaporation deposition. The second part focuses on etching processes and emphasizes reactive ion etching, high-ion-density reactors, ion beam etching, and wet chemical etching.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: NANO211 and NANO212

Lithography for Nanofabrication

NANO214

Lithography for NANOFABRICATION: This course covers all aspects of lithography from design and mask fabrication to pattern transfer and inspection. The course is divided into three major sections. The first describes the lithographic process. The second section examines the process from development through inspection. The last section will discuss advanced optical lithographic techniques.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: NANO211 and NANO212

Materials Modification in Nanofabrication

NANO215

This course covers processing steps used in modifying materials. Included will be growth and annealing processes using furnaces. The impact of thermal processing, which may cause defects on electrical, mechanical, optical, and chemical priorities will be studied. Substrate preparation processing, such as slicing, etching, polishing, and epitaxial growth is covered.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: NANO211 and NANO212

Characterization, Packaging, and Testing of Nanofabrication Structures

NANO216

This course will examine techniques for controlling fabrication and final packaging. Monitoring techniques will be discussed. Basic electrical measurements will be stressed. Mechanical, electrical, chemical, and biological characteristics will be considered. The student will learn about manufacturing issues involved in subjects, such as interconnects isolation, final assembly, and packaging.

3 credits
Prerequisite: Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
Corequisite: NANO211 and NANO212