NANO211 Material, Safety and Equipment Overview

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO211 Material, Safety and Equipment Overview
II. Number of Credits
3 credits
III. Minimum Number of Instructional Minutes Per Semester
lecture 1800 minutes, laboratory 1800 minutes, total 3600 minutes
IV. Prerequisites
Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the certificate curriculum at the Bucks County Community College (BCCC)
Corequisites
None
V. Other Pertinent Information
This course is part of the two new programs of study leading to a Certificate or Degree in NANOFABRICATION TECHNOLOGY. The BCCC has entered into an agreement with PSU (PENN STATE UNIVERSITY) under contract #2067-bccc-cop-2108. Under this contract, the College has developed two new curricula, which will prepare students to attend a group of courses known as the “NANOFABRICATION CAPSTONE SEMESTER COURSES” at the NANOFABRICATION laboratory on the main campus of PSU. This course is one of the six “CAPSTONE COURSES.” Although the course will be presented at PSU, it is an integral part of the two new programs of study.
VI. Catalog Course Description
This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment, and health issues. Topics covered include operation of the several cleanroom systems necessary for environmental safety and health issues. Also specific materials handling issues are addressed.
VII. Required Course Content and Direction
  1. Learning Goals:

    1. Safety in the Laboratory.
    2. Learn the operation of the several laboratory systems which control the cleanroom environment.
    3. Learn the issues necessary in acquiring new equipment for NANOFABRICATION.
    4. Learn the function and how to use the specific laboratory equipment.
    5. Apply acquired information to developing a specific product.
  2. Planned Sequence of Topics and/or Learning Activities:

    1. Environmental, Safety and Health Issues
      1. Cleanroom operation
      2. Vacuum pump systems operation
      3. Furnace operation
      4. Chemical vapor deposition system operation
      5. Vacuum deposition/etching system operation
    2. Materials handling issues
      1. De-ionized water
      2. Solvents
      3. Cleansers
      4. Ion implantation sources
      5. Diffusion sources
      6. Photoresists
      7. Developers
      8. Metals
      9. Dielectrics
      10. Gases
      11. Materials Safety Data Sheet (MSDS) review
  3. Assessment Methods for Core Learning Goals:

  4. Reference, Resource, or Learning Materials to be used by Students:

    Criteria for selection of text material. (See course format) Text material should include most, if not all, topics listed above. It is unlikely there is an existing single text that encompasses all these topics. A combination of handouts and on-line resources will be utilized. Material should be reviewed for content and level of presentation.
VIII. Teaching Methods Employed
To be successful in the field of nanofabrication manufacturing technology, students need to develop a strong understanding of the subject matter, develop good laboratory and problem solving skills, be able to work well with others, and present their ideas clearly and concisely. The course is divided into classroom and laboratory activities to achieve these goals. In lecture, students are exposed to relevant theoretical background and are challenged to develop problem solving skills by utilizing homework assignments that require critical thinking. For example, students might be asked to analyze information about a particular chemical from a Material Safety Data Sheet (MSDS) and recommend procedures for the handling of that chemical that take into account both safety issues and how the chemical is utilized in the NANOFABRICATION processes. Students will be required to make class presentations, write reports, and be involved in team problem solving projects. In the laboratory, students will be engaged in activities, such as rebuilding a vacuum pump, utilizing equipment to control and measure vacuum and gas pressure, and carrying out procedures for the proper handling of chemicals utilized in various the NANOFABRICATION processes.

Review/Approval Date - 3/02