NANO216 Characterization, Packaging, and Testing of Nanofabrication Structures

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO216 Characterization, Packaging, and Testing of Nanofabrication Structures
II. Number of Credits
3 credits
III. Minimum Number of Instructional Minutes Per Semester
lecture 1800 minutes, laboratory 1800 minutes, total 3600 minutes
IV. Prerequisites
Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
NANO211 and NANO212
V. Other Pertinent Information
This course is part of the two new programs of study leading to a Certificate or Degree in NANOFABRICATION TECHNOLOGY. The BCCC has entered into an agreement with PSU (PENN STATE UNIVERSITY) under contract #2067-bccc-cop-2108. Under this contract, the College has developed two new curricula, which will prepare students to attend a group of courses known as the “NANOFABRICATION CAPSTONE SEMESTER COURSES” at the NANOFABRICATION laboratory on the main campus of PSU. This course is one of the six “CAPSTONE COURSES.” Although the course will be presented at PSU, it is an integral part of the two new programs of study.
VI. Catalog Course Description
This course will examine techniques for controlling fabrication and final packaging. Monitoring techniques will be discussed. Basic electrical measurements will be stressed. Mechanical, electrical, chemical, and biological characteristics will be considered. The student will learn about manufacturing issues involved in subjects, such as interconnects isolation, final assembly, and packaging.
VII. Required Course Content and Direction
  1. Learning Goals:

    1. All Nanofabrication applications share the same equipment, processing, materials base and final device packaging challenges. This course will address these issues and examine a variety of techniques and measurements essential for controlling device fabrication and final packaging.
    2. The emphasis will be on learning with and using the state-of-the-art processing equipment in the Nanofabrication Laboratory.
  2. Planned Sequence of Topics and/or Learning Activities:

    1. Process monitoring techniques
      1. Residual gas analysis (RGA)
      2. Optical emission spectroscopy (OES)
      3. Laser interferometry
    2. Surface analysis techniques
      1. Ellipsometry
      2. Profilometery
    3. Oxide electrical characterization
    4. Transistor characterization
    5. Yield analysis techniques
    6. Electron Microscopy
    7. MEM and biomedical devices characterization and testing
    8. Interconnect metalization
    9. Planarization
    10. Packaging
    11. Reliability issues
  3. Assessment Methods for Core Learning Goals:

  4. Reference, Resource, or Learning Materials to be used by Students:

    Criteria for selection of text material. (See course format) Text material should include most, if not all, topics listed above. It is unlikely there is an existing single text that encompasses all these topics. A combination of handouts and on-line resources will be utilized. Material should be reviewed for content and level of presentation.
VIII. Teaching Methods Employed
To be successful in the field of nanofabrication manufacturing technology, students need to develop a strong understanding of the subject matter, develop good laboratory and problem solving skills, be able to work well with others, and present their ideas clearly and concisely. The course is divided into classroom and laboratory activities to achieve these goals. In lecture, students are exposed to relevant theoretical background and are challenged to develop problem-solving skills by using homework assignments that require critical thinking. For example, students may be asked how the results of basic electrical measurements on device structures can be utilized in yield analysis and process control. Students will be required to make class presentations, write reports, and be involved in team problem solving projects. In laboratory, students will characterize real samples utilizing techniques, such as scanning electron microscopy (SEM), surface profilometry, and optical emission spectroscopy. Oxide electrical characteristics will also be measured. Students apply knowledge learned in this course to characterize the results of their fabrication project. In addition, students will generate a yield analysis based on their results, identify steps in the fabrication process that may have decreased yield, and suggest ways in which the process could be altered to increase yield.

Review/Approval Date - 3/02