NANO215 Materials Modification in Nanofabrication

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO215 Materials Modification in Nanofabrication
II. Number of Credits
3 credits
III. Minimum Number of Instructional Minutes Per Semester
lecture 1800 minutes, laboratory 1800 minutes, total 3600 minutes
IV. Prerequisites
Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the Certificate curriculum at the Bucks County Community College (BCCC)
NANO211 and NANO212
V. Other Pertinent Information
This course is part of the two new programs of study leading to a Certificate or Degree in NANOFABRICATION TECHNOLOGY. The BCCC has entered into an agreement with PSU (PENN STATE UNIVERSITY) under contract #2067-bccc-cop-2108. Under this contract, the College has developed two new curricula, which will prepare students to attend a group of courses known as the "NANOFABRICATION CAPSTONE SEMESTER COURSES" at the NANOFABRICATION laboratory on the main campus of PSU. This course is one of the six "CAPSTONE COURSES." Although the course will be presented at PSU, it is an integral part of the two new programs of study.
VI. Catalog Course Description
This course covers processing steps used in modifying materials. Included will be growth and annealing processes using furnaces. The impact of thermal processing, which may cause defects on electrical, mechanical, optical, and chemical priorities will be studied. Substrate preparation processing, such as slicing, etching, polishing, and epitaxial growth is covered.
VII. Required Course Content and Direction
  1. Learning Goals:

    1. The purpose of this course is to provide hands-on experience across the spectrum of materials modification techniques.
    2. The emphasis will be learning to use the state-of the art materials- modification equipment in the NANOFABRICATION Laboratory.
  2. Planned Sequence of Topics and/or Learning Activities:

    1. Introduction to thermal processes
    2. Surface preparation
    3. Oxidation Fundamentals
      1. Kinetics
      2. Measurements
    4. Ion implantation
    5. Rapid thermal annealing
    6. Diffusion processes
    7. Epitaxial growth
  3. Assessment Methods for Core Learning Goals:

  4. Reference, Resource, or Learning Materials to be used by Students:

    Criteria for selection of text material. (See course format) Text material should include most, if not all, topics listed above. It is unlikely there is an existing single text that encompasses all these topics. A combination of handouts and on-line resources will be utilized. Material should be reviewed for content and level of presentation.
VIII. Teaching Methods Employed
Topics, projects, assignments, approaches, timeframes, AV, etc. To be successful in the field of nanofabrication manufacturing technology, students need to develop a strong understanding of the subject matter, develop good laboratory and problem solving skills, be able to work well with others, and present their ideas clearly and concisely. The course is divided into classroom and laboratory activities to achieve these goals. In lecture, students are exposed to relevant theoretical background and are challenged to develop problem-solving skills by using homework assignments that require critical thinking. For example, since a number of material modifications processes are typically used in any fabrication process, students could be asked to investigate the effect of one process upon previous processes. Students also apply knowledge learned to their ongoing fabrication project and actually complete the fabrication process in this course. Students will be required to make class presentations, write reports, and be involved in team problem solving projects. In the laboratory, students will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements using state-of-the-art tools. Included also will be other modification technologies, such as ion implantation, diffusion, and surface preparation and treatment.

Review/Approval Date - 3/02