NANO214 Lithography for Nanofabrication

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO214 Lithography for Nanofabrication
II. Number of Credits
3 credits
III. Number of Instructional Minutes
IV. Prerequisites
V. Other Pertinent Information
VI. Catalog Course Description
This three credit course is part of a six course, eighteen credit, Nanofabrication Manufacturing Technology (NMT) capstone program taught at Penn State University. The Dean of the Science, Technology, Engineering & Mathematics Department located in Founders 112 at Bucks County Community College may be contacted at (215) 968-8305 for additional information.
VII. Required Course Content and Direction

The course is taught at Penn State University with the following course number, name and description.

E SC 214 Patterning for Nanotechnology

This course is a hands-on treatment of all aspects of advanced pattern transfer and pattern transfer equipment including probe techniques; stamping and embossing; e-beam; and optical contact and stepper systems. The course is divided into five major sections. The first section is an overview of all pattern generation processes covering aspects from substrate preparation to tool operation. The second section concentrates on photolithography and examines such topics as mask template, and mold generation. Chemical makeup of resists will be discussed including polymers, solvents, sensitizers, and additives. The role or dyes and antireflective coatings will be discussed. In addition, critical dimension (CD) control and profile control of resists will be investigated. The third section will discuss the particle beam lithographic techniques such as e-beam lithography. The fourth section covers probe pattern generation and the fifth section explores imprinting lithography, step-and-flash, stamp lithography, and self-assembled lithography.

  1. Course Learning Goals

  2. Planned Sequence of Topics and/or Learning Activities

  3. Assessment Methods for Course Learning Goals

  4. Reference, Resource, or Learning Materials to be used by Student:

Review/Approval Date - 3/02; New Core 8/2015