NANO212 Basic Nanofabrication Processes

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO212 Basic Nanofabrication Processes
II. Number of Credits
3 credits
III. Number of Instructional Minutes
IV. Prerequisites
V. Other Pertinent Information
VI. Catalog Course Description
This three credit course is part of a six course, eighteen credit, Nanofabrication Manufacturing Technology (NMT) capstone program taught at Penn State University. The Dean of the Science, Technology, Engineering & Mathematics Department located in Founders 112 at Bucks County Community College may be contacted at (215) 968-8305 for additional information.
VII. Required Course Content and Direction

The course is taught at Penn State University with the following course number, name and description.

E SC 212 Basic Nanotechnology Processes

This course is an overview of the broad spectrum of processing approaches involved in "top down", "bottom up", and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow used in today's device and structure fabrication. Students learn to appreciate processing and manufacturing concerns including safety, process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in "top down" and "bottom up" equipment and process flows by undertaking hands-on processing. This hands-on overview exposure covers basic nanofabrication processes including deposition, etching, and pattern transfer.

  1. Course Learning Goals

  2. Planned Sequence of Topics and/or Learning Activities

  3. Assessment Methods for Course Learning Goals

  4. Reference, Resource, or Learning Materials to be used by Student:

Review/Approval Date - 3/02; New Core 8/2015