NANO212 Basic Nanofabrication Processes

Department of Science, Technology, Engineering & Mathematics: Nanofabrication Technology

I. Course Number and Title
NANO212 Basic Nanofabrication Processes
II. Number of Credits
3 credits
III. Minimum Number of Instructional Minutes Per Semester
lecture 1800 minutes, laboratory 1800 minutes, total 3600 minutes
IV. Prerequisites
Successful completion of the first three semesters of either the NANOFAB Associate degree curriculum or the certificate curriculum at the Bucks County Community College (BCCC)
Corequisites
NANO211
V. Other Pertinent Information
This course is part of the two new programs of study leading to a Certificate or Degree in NANOFABRICATION TECHNOLOGY. The BCCC has entered into an agreement with PSU (PENN STATE UNIVERSITY) under contract #2067-bccc-cop-2108. Under this contract, the College has developed two new curricula, which will prepare students to attend a group of courses known as the “NANOFABRICATION CAPSTONE SEMESTER COURSES” at the NANOFABRICATION laboratory on the main campus of PSU. This course is one of the six “CAPSTONE COURSES.” Although the course will be presented at PSU, it is an integral part of the two new programs of study.
VI. Catalog Course Description
This course provides an overview of basic process steps. The course details the steps needed to fabricate nano size devices. Types of structures studied include microelectromechanical systems, biomedical structures, displays, and microelectronic devices, such as diodes and transistors. Students will learn the process flow for each configuration through "hands-on" processing.
VII. Required Course Content and Direction
  1. Learning Goals:

    1. To learn a specific methodology for NANOMANUFACTURING.
    2. To learn how to structure and build specific electronic device, such as diodes and transistors.
    3. Learn how to structure and fabricate microelectromechanical systems (MEMS).
    4. Learn Biomedical “LAB-ON-CHIP” structures.
  2. Planned Sequence of Topics and/or Learning Activities:

    1. Materials overview
    2. Equipment subsystems
      1. Oxidation furnace
      2. Chemical vapor deposition
      3. Plasma etching
      4. Ion implantation
    3. P-n junction diode process flow
    4. N-p-n bipolar transistor process flow
    5. CMOS transistor process flow
    6. Power device process flow
    7. MEM process flow
    8. Biomedical device fabrication
  3. Assessment Methods for Core Learning Goals:

  4. Reference, Resource, or Learning Materials to be used by Students:

    Criteria for selection of text material. (See course format) Text material should include most, if not all, topics listed above. It is unlikely there is an existing single text that encompasses all these topics. A combination of handouts and on-line resources will be utilized. Material should be reviewed for content and level of presentation.
VIII. Teaching Methods Employed
To be successful in the field of nanofabrication manufacturing technology, students need to develop a strong understanding of the subject matter, develop good laboratory and problem solving skills, be able to work well with others, and present their ideas clearly and concisely. The course is divided into classroom and laboratory activities to achieve these goals. In lecture, students are exposed to relevant theoretical background and are challenged to develop problem-solving skills by utilizing homework assignments that require critical thinking. Students will be required to make class presentations, write reports, and be involved in team problem solving projects. In the laboratory, students will be engaged in activities, such as rebuilding a vacuum pump, utilizing equipment to control and measure vacuum and gas pressure, and carrying out procedures for the proper handling of chemicals utilized in various the NANOFABRICATION processes. In this course, students begin work on a project, such as diode fabrication, which spans the remaining courses in the CAPSTONE SEMESTER sequence. Students must apply knowledge of material learned in lecture with techniques and procedures learned in lab to develop a plan to carry out their project.

Review/Approval Date - 3/02